11/4/2011	7:56:24 AM	Tube furnace set to 150
11/4/2011	8:03:13 AM	Main Vac valve closed
11/4/2011	8:03:34 AM	Main Vac valve opened
11/4/2011	8:05:23 AM	Recipe started at 8:05 AM
11/4/2011	8:05:24 AM	Helium valve closed
11/4/2011	8:05:24 AM	H2 valve closed
11/4/2011	8:05:24 AM	BCl3 valve closed
11/4/2011	8:05:24 AM	PH3 valve closed
11/4/2011	8:05:24 AM	SiCl4 pre valve closed
11/4/2011	8:05:24 AM	SiCl4 post valve closed
11/4/2011	8:05:24 AM	Main Vac valve closed
11/4/2011	8:05:24 AM	Bypass valve closed
11/4/2011	8:05:24 AM	Bubbler valve closed
11/4/2011	8:05:24 AM	Helium MFC set to  0.000000
11/4/2011	8:05:24 AM	H2 MFC set to  0.000000
11/4/2011	8:05:24 AM	BCl3 MFC set to  0.000000
11/4/2011	8:05:24 AM	PHl3 MFC set to  0.000000
11/4/2011	8:05:24 AM	SiCl4 MFC set to  0.000000
11/4/2011	8:05:24 AM	Bypass solenoid MFC set to  0.000000
11/4/2011	8:05:24 AM	Tube furnace set to 0
11/4/2011	8:05:27 AM	Helium valve closed
11/4/2011	8:05:27 AM	BCl3 valve closed
11/4/2011	8:05:27 AM	PH3 valve closed
11/4/2011	8:05:27 AM	SiCl4 pre valve closed
11/4/2011	8:05:27 AM	SiCl4 post valve closed
11/4/2011	8:05:27 AM	Main Vac valve closed
11/4/2011	8:05:27 AM	Bypass valve closed
11/4/2011	8:05:27 AM	Bubbler valve closed
11/4/2011	8:05:27 AM	H2 valve opened
11/4/2011	8:05:27 AM	Helium MFC set to  0.000000
11/4/2011	8:05:27 AM	H2 MFC set to  500.000000
11/4/2011	8:05:27 AM	BCl3 MFC set to  0.000000
11/4/2011	8:05:27 AM	PHl3 MFC set to  0.000000
11/4/2011	8:05:27 AM	SiCl4 MFC set to  0.000000
11/4/2011	8:05:27 AM	Bypass solenoid MFC set to  0.000000
11/4/2011	8:05:27 AM	Tube furnace set to 0
11/4/2011	8:06:31 AM	Helium valve closed
11/4/2011	8:06:31 AM	BCl3 valve closed
11/4/2011	8:06:31 AM	PH3 valve closed
11/4/2011	8:06:31 AM	SiCl4 pre valve closed
11/4/2011	8:06:31 AM	SiCl4 post valve closed
11/4/2011	8:06:31 AM	Main Vac valve closed
11/4/2011	8:06:31 AM	Bypass valve closed
11/4/2011	8:06:31 AM	H2 valve opened
11/4/2011	8:06:31 AM	Bubbler valve opened
11/4/2011	8:06:31 AM	Helium MFC set to  0.000000
11/4/2011	8:06:31 AM	H2 MFC set to  500.000000
11/4/2011	8:06:31 AM	BCl3 MFC set to  0.000000
11/4/2011	8:06:31 AM	PHl3 MFC set to  0.000000
11/4/2011	8:06:31 AM	SiCl4 MFC set to  0.000000
11/4/2011	8:06:31 AM	Bypass solenoid MFC set to  0.000000
11/4/2011	8:06:31 AM	Tube furnace set to 0
11/4/2011	8:06:32 AM	Helium valve closed
11/4/2011	8:06:32 AM	BCl3 valve closed
11/4/2011	8:06:32 AM	PH3 valve closed
11/4/2011	8:06:32 AM	SiCl4 pre valve closed
11/4/2011	8:06:32 AM	SiCl4 post valve closed
11/4/2011	8:06:32 AM	Main Vac valve closed
11/4/2011	8:06:32 AM	Bypass valve closed
11/4/2011	8:06:32 AM	H2 valve opened
11/4/2011	8:06:32 AM	Bubbler valve opened
11/4/2011	8:06:32 AM	Helium MFC set to  0.000000
11/4/2011	8:06:32 AM	H2 MFC set to  500.000000
11/4/2011	8:06:32 AM	BCl3 MFC set to  0.000000
11/4/2011	8:06:32 AM	PHl3 MFC set to  0.000000
11/4/2011	8:06:32 AM	SiCl4 MFC set to  0.000000
11/4/2011	8:06:32 AM	Bypass solenoid MFC set to  0.000000
11/4/2011	8:06:32 AM	Tube furnace set to 1035
11/4/2011	8:28:32 AM	Helium valve closed
11/4/2011	8:28:32 AM	PH3 valve closed
11/4/2011	8:28:32 AM	Main Vac valve closed
11/4/2011	8:28:32 AM	Bypass valve closed
11/4/2011	8:28:32 AM	H2 valve opened
11/4/2011	8:28:32 AM	BCl3 valve opened
11/4/2011	8:28:32 AM	SiCl4 pre valve opened
11/4/2011	8:28:32 AM	SiCl4 post valve opened
11/4/2011	8:28:32 AM	Bubbler valve opened
11/4/2011	8:28:32 AM	Helium MFC set to  0.000000
11/4/2011	8:28:32 AM	H2 MFC set to  500.000000
11/4/2011	8:28:32 AM	BCl3 MFC set to  2.800000
11/4/2011	8:28:32 AM	PHl3 MFC set to  0.000000
11/4/2011	8:28:32 AM	SiCl4 MFC set to  70.000000
11/4/2011	8:28:32 AM	Bypass solenoid MFC set to  0.000000
11/4/2011	8:28:32 AM	Tube furnace set to 1035
11/4/2011	8:43:32 AM	Helium valve closed
11/4/2011	8:43:32 AM	BCl3 valve closed
11/4/2011	8:43:32 AM	PH3 valve closed
11/4/2011	8:43:32 AM	SiCl4 pre valve closed
11/4/2011	8:43:32 AM	SiCl4 post valve closed
11/4/2011	8:43:32 AM	Main Vac valve closed
11/4/2011	8:43:32 AM	Bypass valve closed
11/4/2011	8:43:32 AM	H2 valve opened
11/4/2011	8:43:32 AM	Bubbler valve opened
11/4/2011	8:43:32 AM	Helium MFC set to  0.000000
11/4/2011	8:43:32 AM	H2 MFC set to  400.000000
11/4/2011	8:43:32 AM	BCl3 MFC set to  0.000000
11/4/2011	8:43:32 AM	PHl3 MFC set to  0.000000
11/4/2011	8:43:32 AM	SiCl4 MFC set to  0.000000
11/4/2011	8:43:32 AM	Bypass solenoid MFC set to  0.000000
11/4/2011	8:43:32 AM	Tube furnace set to 750
11/4/2011	8:51:02 AM	H2 valve closed
11/4/2011	8:51:02 AM	BCl3 valve closed
11/4/2011	8:51:02 AM	PH3 valve closed
11/4/2011	8:51:02 AM	SiCl4 pre valve closed
11/4/2011	8:51:02 AM	SiCl4 post valve closed
11/4/2011	8:51:02 AM	Main Vac valve closed
11/4/2011	8:51:02 AM	Bypass valve closed
11/4/2011	8:51:02 AM	Helium valve opened
11/4/2011	8:51:02 AM	Bubbler valve opened
11/4/2011	8:51:02 AM	Helium MFC set to  400.000000
11/4/2011	8:51:02 AM	H2 MFC set to  0.000000
11/4/2011	8:51:02 AM	BCl3 MFC set to  0.000000
11/4/2011	8:51:02 AM	PHl3 MFC set to  0.000000
11/4/2011	8:51:02 AM	SiCl4 MFC set to  0.000000
11/4/2011	8:51:02 AM	Bypass solenoid MFC set to  0.000000
11/4/2011	8:51:03 AM	Tube furnace set to 0
11/4/2011	9:11:03 AM	Helium valve closed
11/4/2011	9:11:03 AM	H2 valve closed
11/4/2011	9:11:03 AM	BCl3 valve closed
11/4/2011	9:11:03 AM	PH3 valve closed
11/4/2011	9:11:03 AM	SiCl4 pre valve closed
11/4/2011	9:11:03 AM	SiCl4 post valve closed
11/4/2011	9:11:03 AM	Main Vac valve closed
11/4/2011	9:11:03 AM	Bypass valve closed
11/4/2011	9:11:03 AM	Bubbler valve closed
11/4/2011	9:11:03 AM	Helium MFC set to  0.000000
11/4/2011	9:11:03 AM	H2 MFC set to  0.000000
11/4/2011	9:11:03 AM	BCl3 MFC set to  0.000000
11/4/2011	9:11:03 AM	PHl3 MFC set to  0.000000
11/4/2011	9:11:03 AM	SiCl4 MFC set to  0.000000
11/4/2011	9:11:03 AM	Bypass solenoid MFC set to  0.000000
11/4/2011	9:11:03 AM	Tube furnace set to 0
11/4/2011	9:11:04 AM	Run finished at 9:11 AM
11/4/2011	9:14:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/4/2011	9:14:16 AM	Recipe started at 9:14 AM
11/4/2011	9:14:16 AM	Helium valve closed
11/4/2011	9:14:16 AM	H2 valve closed
11/4/2011	9:14:16 AM	BCl3 valve closed
11/4/2011	9:14:16 AM	PH3 valve closed
11/4/2011	9:14:16 AM	SiCl4 pre valve closed
11/4/2011	9:14:16 AM	SiCl4 post valve closed
11/4/2011	9:14:16 AM	Main Vac valve closed
11/4/2011	9:14:16 AM	Bubbler valve closed
11/4/2011	9:14:16 AM	Bypass valve opened
11/4/2011	9:14:16 AM	Helium MFC set to  0.000000
11/4/2011	9:14:16 AM	H2 MFC set to  0.000000
11/4/2011	9:14:16 AM	BCl3 MFC set to  0.000000
11/4/2011	9:14:16 AM	PHl3 MFC set to  0.000000
11/4/2011	9:14:16 AM	SiCl4 MFC set to  0.000000
11/4/2011	9:14:16 AM	Bypass solenoid MFC set to  0.000000
11/4/2011	9:14:16 AM	Tube furnace set to 0
11/4/2011	9:15:19 AM	Helium valve closed
11/4/2011	9:15:19 AM	H2 valve closed
11/4/2011	9:15:19 AM	BCl3 valve closed
11/4/2011	9:15:19 AM	PH3 valve closed
11/4/2011	9:15:19 AM	SiCl4 pre valve closed
11/4/2011	9:15:19 AM	SiCl4 post valve closed
11/4/2011	9:15:19 AM	Main Vac valve closed
11/4/2011	9:15:19 AM	Bubbler valve closed
11/4/2011	9:15:19 AM	Bypass valve opened
11/4/2011	9:15:19 AM	Helium MFC set to  0.000000
11/4/2011	9:15:19 AM	H2 MFC set to  0.000000
11/4/2011	9:15:19 AM	BCl3 MFC set to  0.000000
11/4/2011	9:15:19 AM	PHl3 MFC set to  0.000000
11/4/2011	9:15:19 AM	SiCl4 MFC set to  0.000000
11/4/2011	9:15:19 AM	Bypass solenoid MFC set to  0.000000
11/4/2011	9:15:19 AM	Tube furnace set to 0
11/4/2011	9:16:19 AM	Helium valve closed
11/4/2011	9:16:19 AM	H2 valve closed
11/4/2011	9:16:19 AM	BCl3 valve closed
11/4/2011	9:16:19 AM	PH3 valve closed
11/4/2011	9:16:19 AM	SiCl4 pre valve closed
11/4/2011	9:16:19 AM	SiCl4 post valve closed
11/4/2011	9:16:19 AM	Bypass valve closed
11/4/2011	9:16:19 AM	Bubbler valve closed
11/4/2011	9:16:19 AM	Main Vac valve opened
11/4/2011	9:16:19 AM	Helium MFC set to  0.000000
11/4/2011	9:16:19 AM	H2 MFC set to  0.000000
11/4/2011	9:16:19 AM	BCl3 MFC set to  0.000000
11/4/2011	9:16:19 AM	PHl3 MFC set to  0.000000
11/4/2011	9:16:19 AM	SiCl4 MFC set to  0.000000
11/4/2011	9:16:19 AM	Bypass solenoid MFC set to  0.000000
11/4/2011	9:16:20 AM	Tube furnace set to 0
11/4/2011	9:16:21 AM	Run finished at 9:16 AM
11/4/2011	9:16:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/4/2011	9:39:42 AM	Main Vac valve closed
11/4/2011	9:39:43 AM	Bypass valve opened
11/4/2011	9:39:46 AM	Helium MFC set to  500.000000
11/4/2011	9:39:50 AM	H2 MFC set to  500.000000
11/4/2011	9:39:51 AM	H2 valve opened
11/4/2011	9:39:52 AM	Helium valve opened
11/4/2011	9:40:23 AM	SiCl4 post valve opened
11/4/2011	9:40:24 AM	SiCl4 pre valve opened
11/4/2011	9:40:27 AM	SiCl4 MFC set to  50.000000
11/4/2011	9:40:30 AM	SiCl4 MFC set to  100.000000
11/4/2011	9:41:49 AM	Bypass valve closed
11/4/2011	9:41:49 AM	Main Vac valve opened
11/4/2011	9:43:15 AM	Main Vac valve closed
11/4/2011	9:43:22 AM	Main Vac valve opened
11/4/2011	9:43:28 AM	Main Vac valve closed
11/4/2011	9:43:29 AM	H2 valve closed
11/4/2011	9:43:30 AM	SiCl4 post valve closed
11/4/2011	9:43:30 AM	SiCl4 pre valve closed
11/4/2011	9:43:31 AM	Bypass valve opened
11/4/2011	9:44:23 AM	Helium valve closed
11/4/2011	9:44:29 AM	Bypass valve closed
11/4/2011	9:44:41 AM	Helium valve opened
11/4/2011	9:45:05 AM	Bypass valve opened
11/4/2011	9:49:52 AM	Bypass valve closed
11/4/2011	9:49:53 AM	Main Vac valve opened
11/4/2011	9:50:16 AM	Main Vac valve closed
11/4/2011	9:50:24 AM	Helium valve closed
11/4/2011	9:50:24 AM	H2 valve closed
11/4/2011	9:50:24 AM	BCl3 valve closed
11/4/2011	9:50:24 AM	PH3 valve closed
11/4/2011	9:50:24 AM	SiCl4 pre valve closed
11/4/2011	9:50:24 AM	SiCl4 post valve closed
11/4/2011	9:50:24 AM	Main Vac valve closed
11/4/2011	9:50:24 AM	Bubbler valve closed
11/4/2011	9:50:24 AM	Bypass valve closed
11/4/2011	9:50:24 AM	Helium MFC set to  0.000000
11/4/2011	9:50:24 AM	H2 MFC set to  0.000000
11/4/2011	9:50:24 AM	BCl3 MFC set to  0.000000
11/4/2011	9:50:24 AM	PHl3 MFC set to  0.000000
11/4/2011	9:50:24 AM	SiCl4 MFC set to  0.000000
11/4/2011	9:50:24 AM	Bypass solenoid MFC set to  760.000000
11/4/2011	9:50:25 AM	Tube furnace set to 0
11/4/2011	9:50:25 AM	Baratron reads 950.588065 Torr.  Emergency exit.
11/4/2011	9:50:29 AM	Program exited cleanly
11/4/2011	9:50:31 AM	Helium valve closed
11/4/2011	9:50:31 AM	H2 valve closed
11/4/2011	9:50:31 AM	BCl3 valve closed
11/4/2011	9:50:31 AM	PH3 valve closed
11/4/2011	9:50:31 AM	SiCl4 pre valve closed
11/4/2011	9:50:31 AM	SiCl4 post valve closed
11/4/2011	9:50:31 AM	Main Vac valve closed
11/4/2011	9:50:31 AM	Bypass valve closed
11/4/2011	9:50:31 AM	Bubbler valve closed
11/4/2011	9:50:31 AM	Helium MFC set to  0.000000
11/4/2011	9:50:31 AM	H2 MFC set to  0.000000
11/4/2011	9:50:31 AM	BCl3 MFC set to  0.000000
11/4/2011	9:50:31 AM	PHl3 MFC set to  0.000000
11/4/2011	9:50:31 AM	SiCl4 MFC set to  0.000000
11/4/2011	9:50:31 AM	Bypass solenoid MFC set to  760.000000
11/4/2011	9:50:31 AM	Tube furnace set to 0
11/4/2011	9:50:31 AM	Helium valve closed
11/4/2011	9:50:31 AM	H2 valve closed
11/4/2011	9:50:31 AM	BCl3 valve closed
11/4/2011	9:50:31 AM	PH3 valve closed
11/4/2011	9:50:31 AM	SiCl4 pre valve closed
11/4/2011	9:50:31 AM	SiCl4 post valve closed
11/4/2011	9:50:31 AM	Main Vac valve closed
11/4/2011	9:50:31 AM	Bubbler valve closed
11/4/2011	9:50:31 AM	Bypass valve closed
11/4/2011	9:50:31 AM	Helium MFC set to  0.000000
11/4/2011	9:50:31 AM	H2 MFC set to  0.000000
11/4/2011	9:50:31 AM	BCl3 MFC set to  0.000000
11/4/2011	9:50:31 AM	PHl3 MFC set to  0.000000
11/4/2011	9:50:31 AM	SiCl4 MFC set to  0.000000
11/4/2011	9:50:31 AM	Bypass solenoid MFC set to  760.000000
11/4/2011	9:50:32 AM	Tube furnace set to 0
11/4/2011	9:50:32 AM	Baratron reads 983.254562 Torr.  Emergency exit.
11/4/2011	9:50:33 AM	Program exited cleanly
11/4/2011	9:50:51 AM	Helium valve closed
11/4/2011	9:50:52 AM	H2 valve closed
11/4/2011	9:50:52 AM	BCl3 valve closed
11/4/2011	9:50:52 AM	PH3 valve closed
11/4/2011	9:50:52 AM	SiCl4 pre valve closed
11/4/2011	9:50:52 AM	SiCl4 post valve closed
11/4/2011	9:50:52 AM	Main Vac valve closed
11/4/2011	9:50:52 AM	Bypass valve closed
11/4/2011	9:50:52 AM	Bubbler valve closed
11/4/2011	9:50:52 AM	Helium MFC set to  0.000000
11/4/2011	9:50:52 AM	H2 MFC set to  0.000000
11/4/2011	9:50:52 AM	BCl3 MFC set to  0.000000
11/4/2011	9:50:52 AM	PHl3 MFC set to  0.000000
11/4/2011	9:50:52 AM	SiCl4 MFC set to  0.000000
11/4/2011	9:50:52 AM	Bypass solenoid MFC set to  760.000000
11/4/2011	9:50:52 AM	Tube furnace set to 0
11/4/2011	9:50:52 AM	Bypass valve opened
11/4/2011	9:51:03 AM	Helium valve opened
11/4/2011	9:51:20 AM	Helium MFC set to  100.000000
11/4/2011	9:51:26 AM	Helium MFC set to  500.000000
11/4/2011	9:56:23 AM	Bypass valve closed
11/4/2011	9:56:23 AM	Main Vac valve opened
11/4/2011	9:57:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
11/4/2011	9:57:03 AM	Recipe started at 9:57 AM
11/4/2011	9:57:03 AM	Helium valve closed
11/4/2011	9:57:03 AM	H2 valve closed
11/4/2011	9:57:03 AM	BCl3 valve closed
11/4/2011	9:57:03 AM	PH3 valve closed
11/4/2011	9:57:03 AM	SiCl4 pre valve closed
11/4/2011	9:57:03 AM	SiCl4 post valve closed
11/4/2011	9:57:03 AM	Main Vac valve closed
11/4/2011	9:57:03 AM	Bypass valve closed
11/4/2011	9:57:03 AM	Bubbler valve closed
11/4/2011	9:57:03 AM	Helium MFC set to  0.000000
11/4/2011	9:57:03 AM	H2 MFC set to  0.000000
11/4/2011	9:57:03 AM	BCl3 MFC set to  0.000000
11/4/2011	9:57:03 AM	PHl3 MFC set to  0.000000
11/4/2011	9:57:03 AM	SiCl4 MFC set to  0.000000
11/4/2011	9:57:03 AM	Bypass solenoid MFC set to  0.000000
11/4/2011	9:57:03 AM	Tube furnace set to 0
11/4/2011	9:57:04 AM	Run finished at 9:57 AM
11/4/2011	9:57:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
11/4/2011	9:57:25 AM	Helium MFC set to  1.000000
11/4/2011	9:57:26 AM	Helium valve opened
11/4/2011	9:57:31 AM	Helium MFC set to  500.000000
11/4/2011	9:58:27 AM	Bubbler valve opened
11/4/2011	10:23:52 AM	Bubbler valve closed
11/4/2011	10:23:53 AM	Helium valve closed
11/4/2011	10:26:28 AM	Helium MFC set to  0.000000
11/4/2011	10:26:33 AM	H2 MFC set to  500.000000
11/4/2011	10:26:37 AM	SiCl4 MFC set to  100.000000
11/4/2011	10:27:02 AM	H2 valve opened
11/4/2011	10:27:10 AM	SiCl4 post valve opened
11/4/2011	10:27:10 AM	SiCl4 pre valve opened
11/4/2011	10:27:14 AM	Bypass valve opened
11/4/2011	10:29:54 AM	Bypass valve closed
11/4/2011	10:29:55 AM	Main Vac valve opened
11/4/2011	10:30:24 AM	Main Vac valve closed
11/4/2011	10:30:25 AM	H2 valve closed
11/4/2011	10:30:26 AM	SiCl4 post valve closed
11/4/2011	10:30:27 AM	SiCl4 pre valve closed
11/4/2011	10:30:30 AM	Helium MFC set to  500.000000
11/4/2011	10:30:34 AM	Program exited cleanly
11/4/2011	10:30:46 AM	Helium valve closed
11/4/2011	10:30:46 AM	H2 valve closed
11/4/2011	10:30:46 AM	BCl3 valve closed
11/4/2011	10:30:46 AM	PH3 valve closed
11/4/2011	10:30:46 AM	SiCl4 pre valve closed
11/4/2011	10:30:46 AM	SiCl4 post valve closed
11/4/2011	10:30:46 AM	Main Vac valve closed
11/4/2011	10:30:46 AM	Bypass valve closed
11/4/2011	10:30:46 AM	Bubbler valve closed
11/4/2011	10:30:46 AM	Helium MFC set to  0.000000
11/4/2011	10:30:46 AM	H2 MFC set to  0.000000
11/4/2011	10:30:46 AM	BCl3 MFC set to  0.000000
11/4/2011	10:30:46 AM	PHl3 MFC set to  0.000000
11/4/2011	10:30:46 AM	SiCl4 MFC set to  0.000000
11/4/2011	10:30:46 AM	Bypass solenoid MFC set to  760.000000
11/4/2011	10:30:46 AM	Tube furnace set to 0
11/4/2011	10:30:49 AM	Helium valve opened
11/4/2011	10:30:51 AM	Helium MFC set to  10.000000
11/4/2011	10:31:01 AM	Helium MFC set to  500.000000
11/4/2011	10:32:07 AM	Helium valve closed
11/4/2011	10:32:12 AM	H2 MFC set to  500.000000
11/4/2011	10:32:15 AM	H2 valve opened
11/4/2011	10:32:18 AM	SiCl4 MFC set to  100.000000
11/4/2011	10:32:19 AM	SiCl4 post valve opened
11/4/2011	10:32:20 AM	SiCl4 pre valve opened
11/4/2011	10:32:21 AM	Bypass valve opened
11/4/2011	10:33:37 AM	Bypass valve closed
11/4/2011	10:33:37 AM	Main Vac valve opened
11/4/2011	10:39:48 AM	Main Vac valve closed
11/4/2011	10:39:48 AM	H2 valve closed
11/4/2011	10:39:49 AM	SiCl4 post valve closed
11/4/2011	10:39:49 AM	SiCl4 pre valve closed
11/4/2011	10:39:56 AM	Helium valve opened
11/4/2011	10:41:02 AM	Bypass valve opened
11/4/2011	10:41:03 AM	Bypass valve closed
11/4/2011	10:41:27 AM	Helium valve closed
11/4/2011	10:41:30 AM	H2 valve opened
11/4/2011	10:41:31 AM	SiCl4 post valve opened
11/4/2011	10:41:32 AM	SiCl4 pre valve opened
11/4/2011	10:41:39 AM	Bypass valve opened
11/4/2011	10:42:47 AM	Bypass valve closed
11/4/2011	10:42:47 AM	Main Vac valve opened
11/4/2011	11:02:12 AM	Main Vac valve closed
11/4/2011	11:02:19 AM	H2 valve closed
11/4/2011	11:02:19 AM	SiCl4 post valve closed
11/4/2011	11:02:20 AM	SiCl4 pre valve closed
11/4/2011	11:02:24 AM	Helium MFC set to  5.000000
11/4/2011	11:02:26 AM	Helium valve opened
11/4/2011	11:02:31 AM	Helium MFC set to  500.000000
11/4/2011	11:03:40 AM	Helium valve closed
11/4/2011	11:03:43 AM	H2 valve opened
11/4/2011	11:03:44 AM	SiCl4 post valve opened
11/4/2011	11:03:44 AM	SiCl4 pre valve opened
11/4/2011	11:03:47 AM	Bypass valve opened
11/4/2011	11:05:17 AM	Bypass valve closed
11/4/2011	11:05:18 AM	Main Vac valve opened
11/4/2011	11:12:59 AM	H2 valve closed
11/4/2011	11:13:00 AM	SiCl4 post valve closed
11/4/2011	11:13:00 AM	SiCl4 pre valve closed
11/4/2011	11:13:03 AM	Main Vac valve closed
11/4/2011	11:13:04 AM	Helium valve opened
11/4/2011	11:14:12 AM	Helium valve closed
11/4/2011	11:14:16 AM	H2 valve opened
11/4/2011	11:14:17 AM	SiCl4 post valve opened
11/4/2011	11:14:18 AM	SiCl4 pre valve opened
11/4/2011	11:14:23 AM	Helium valve opened
11/4/2011	11:14:33 AM	Helium valve closed
11/4/2011	11:14:36 AM	Helium valve opened
11/4/2011	11:14:38 AM	Helium valve closed
11/4/2011	11:22:14 AM	Bypass valve opened
11/4/2011	11:27:16 AM	H2 valve closed
11/4/2011	11:27:17 AM	SiCl4 post valve closed
11/4/2011	11:27:19 AM	SiCl4 pre valve closed
11/4/2011	11:27:22 AM	SiCl4 MFC set to  100.000000
11/4/2011	11:27:26 AM	SiCl4 MFC set to  0.000000
11/4/2011	11:27:29 AM	H2 MFC set to  0.000000
11/4/2011	11:27:37 AM	Helium MFC set to  0.000000
11/4/2011	11:27:40 AM	Bypass valve closed
11/4/2011	11:27:44 AM	Helium MFC set to  500.000000
11/4/2011	11:27:45 AM	Helium valve opened
11/4/2011	11:28:49 AM	Helium valve closed
11/4/2011	11:28:55 AM	Helium MFC set to  0.000000
11/4/2011	11:30:34 AM	H2 MFC set to  500.000000
11/4/2011	11:30:40 AM	SiCl4 MFC set to  100.000000
11/4/2011	11:30:42 AM	H2 valve opened
11/4/2011	11:30:43 AM	SiCl4 post valve opened
11/4/2011	11:30:44 AM	SiCl4 pre valve opened
11/4/2011	11:30:47 AM	Helium MFC set to  500.000000
11/4/2011	11:30:48 AM	Helium valve opened
11/4/2011	11:31:04 AM	Helium valve closed
11/4/2011	11:31:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
11/4/2011	11:31:06 AM	Recipe started at 11:31 AM
11/4/2011	11:31:06 AM	Helium valve closed
11/4/2011	11:31:06 AM	H2 valve closed
11/4/2011	11:31:06 AM	BCl3 valve closed
11/4/2011	11:31:06 AM	PH3 valve closed
11/4/2011	11:31:06 AM	SiCl4 pre valve closed
11/4/2011	11:31:06 AM	SiCl4 post valve closed
11/4/2011	11:31:06 AM	Main Vac valve closed
11/4/2011	11:31:06 AM	Bypass valve closed
11/4/2011	11:31:06 AM	Bubbler valve closed
11/4/2011	11:31:06 AM	Helium MFC set to  0.000000
11/4/2011	11:31:06 AM	H2 MFC set to  0.000000
11/4/2011	11:31:06 AM	BCl3 MFC set to  0.000000
11/4/2011	11:31:06 AM	PHl3 MFC set to  0.000000
11/4/2011	11:31:06 AM	SiCl4 MFC set to  0.000000
11/4/2011	11:31:06 AM	Bypass solenoid MFC set to  0.000000
11/4/2011	11:31:06 AM	Tube furnace set to 0
11/4/2011	11:31:06 AM	Run finished at 11:31 AM
11/4/2011	11:31:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
11/4/2011	11:38:57 AM	H2 MFC set to  500.000000
11/4/2011	11:38:58 AM	H2 valve opened
11/4/2011	11:39:01 AM	SiCl4 MFC set to  100.000000
11/4/2011	11:39:02 AM	SiCl4 post valve opened
11/4/2011	11:39:02 AM	SiCl4 pre valve opened
11/4/2011	11:39:03 AM	Bypass valve opened
11/4/2011	11:41:24 AM	Bypass valve closed
11/4/2011	11:41:25 AM	Main Vac valve opened
11/4/2011	11:41:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
11/4/2011	11:41:43 AM	Recipe started at 11:41 AM
11/4/2011	11:41:43 AM	Helium valve closed
11/4/2011	11:41:43 AM	H2 valve closed
11/4/2011	11:41:43 AM	BCl3 valve closed
11/4/2011	11:41:43 AM	PH3 valve closed
11/4/2011	11:41:43 AM	SiCl4 pre valve closed
11/4/2011	11:41:43 AM	SiCl4 post valve closed
11/4/2011	11:41:43 AM	Main Vac valve closed
11/4/2011	11:41:43 AM	Bypass valve closed
11/4/2011	11:41:43 AM	Bubbler valve closed
11/4/2011	11:41:43 AM	Helium MFC set to  0.000000
11/4/2011	11:41:43 AM	H2 MFC set to  0.000000
11/4/2011	11:41:43 AM	BCl3 MFC set to  0.000000
11/4/2011	11:41:43 AM	PHl3 MFC set to  0.000000
11/4/2011	11:41:43 AM	SiCl4 MFC set to  0.000000
11/4/2011	11:41:43 AM	Bypass solenoid MFC set to  0.000000
11/4/2011	11:41:43 AM	Tube furnace set to 0
11/4/2011	11:41:43 AM	Run finished at 11:41 AM
11/4/2011	11:41:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
11/4/2011	11:41:48 AM	Helium MFC set to  500.000000
11/4/2011	11:41:48 AM	Helium valve opened
11/4/2011	11:42:56 AM	Helium valve closed
11/4/2011	11:43:00 AM	H2 MFC set to  500.000000
11/4/2011	11:43:03 AM	SiCl4 MFC set to  100.000000
11/4/2011	11:43:04 AM	H2 valve opened
11/4/2011	11:43:05 AM	SiCl4 post valve opened
11/4/2011	11:43:05 AM	SiCl4 pre valve opened
11/4/2011	11:43:12 AM	Helium valve opened
11/4/2011	11:43:27 AM	Helium valve closed
11/4/2011	11:43:29 AM	Bypass valve opened
11/4/2011	11:44:29 AM	Bypass valve closed
11/4/2011	11:44:29 AM	Main Vac valve opened
11/4/2011	11:44:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
11/4/2011	11:44:59 AM	Recipe started at 11:44 AM
11/4/2011	11:44:59 AM	Helium valve closed
11/4/2011	11:44:59 AM	H2 valve closed
11/4/2011	11:44:59 AM	BCl3 valve closed
11/4/2011	11:44:59 AM	PH3 valve closed
11/4/2011	11:44:59 AM	SiCl4 pre valve closed
11/4/2011	11:44:59 AM	SiCl4 post valve closed
11/4/2011	11:44:59 AM	Main Vac valve closed
11/4/2011	11:44:59 AM	Bypass valve closed
11/4/2011	11:44:59 AM	Bubbler valve closed
11/4/2011	11:44:59 AM	Helium MFC set to  0.000000
11/4/2011	11:44:59 AM	H2 MFC set to  0.000000
11/4/2011	11:44:59 AM	BCl3 MFC set to  0.000000
11/4/2011	11:44:59 AM	PHl3 MFC set to  0.000000
11/4/2011	11:44:59 AM	SiCl4 MFC set to  0.000000
11/4/2011	11:44:59 AM	Bypass solenoid MFC set to  0.000000
11/4/2011	11:44:59 AM	Tube furnace set to 0
11/4/2011	11:44:59 AM	Run finished at 11:44 AM
11/4/2011	11:44:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
11/4/2011	11:45:03 AM	Helium MFC set to  500.000000
11/4/2011	11:45:03 AM	Helium valve opened
11/4/2011	11:46:12 AM	Helium valve closed
11/4/2011	11:46:16 AM	H2 MFC set to  500.000000
11/4/2011	11:46:19 AM	SiCl4 MFC set to  100.000000
11/4/2011	11:46:20 AM	H2 valve opened
11/4/2011	11:46:21 AM	SiCl4 post valve opened
11/4/2011	11:46:21 AM	SiCl4 pre valve opened
11/4/2011	11:46:23 AM	Helium valve opened
11/4/2011	11:46:33 AM	Helium valve closed
11/4/2011	11:46:36 AM	Bypass valve opened
11/4/2011	11:47:39 AM	Bypass valve closed
11/4/2011	11:47:40 AM	Main Vac valve opened
11/4/2011	11:48:03 AM	H2 valve closed
11/4/2011	11:48:03 AM	SiCl4 post valve closed
11/4/2011	11:48:04 AM	SiCl4 pre valve closed
11/4/2011	11:48:05 AM	Main Vac valve closed
11/4/2011	11:48:06 AM	Helium valve opened
11/4/2011	11:49:15 AM	Helium valve closed
11/4/2011	11:49:16 AM	H2 valve opened
11/4/2011	11:49:17 AM	SiCl4 post valve opened
11/4/2011	11:49:17 AM	SiCl4 pre valve opened
11/4/2011	11:49:19 AM	Helium valve opened
11/4/2011	11:49:27 AM	Helium valve closed
11/4/2011	11:49:28 AM	Helium valve opened
11/4/2011	11:49:33 AM	Helium valve closed
11/4/2011	11:49:38 AM	Bypass valve opened
11/4/2011	11:51:05 AM	Bypass valve closed
11/4/2011	11:51:06 AM	Main Vac valve opened
11/4/2011	11:51:18 AM	Main Vac valve closed
11/4/2011	11:51:19 AM	H2 valve closed
11/4/2011	11:51:20 AM	SiCl4 post valve closed
11/4/2011	11:51:20 AM	SiCl4 pre valve closed
11/4/2011	11:51:20 AM	Helium valve opened
11/4/2011	11:52:31 AM	Helium valve closed
11/4/2011	11:52:32 AM	H2 valve opened
11/4/2011	11:52:33 AM	SiCl4 post valve opened
11/4/2011	11:52:33 AM	SiCl4 pre valve opened
11/4/2011	11:52:34 AM	Helium valve opened
11/4/2011	11:52:46 AM	Helium valve closed
11/4/2011	11:52:48 AM	Helium valve opened
11/4/2011	11:52:50 AM	Helium valve closed
11/4/2011	12:00:39 PM	Helium valve opened
11/4/2011	12:01:50 PM	Helium valve closed
11/4/2011	12:02:12 PM	Helium valve opened
11/4/2011	12:02:16 PM	Helium valve closed
11/4/2011	12:03:10 PM	H2 MFC set to  100.000000
11/4/2011	12:03:17 PM	Helium valve closed
11/4/2011	12:03:17 PM	H2 valve closed
11/4/2011	12:03:17 PM	BCl3 valve closed
11/4/2011	12:03:17 PM	PH3 valve closed
11/4/2011	12:03:17 PM	SiCl4 pre valve closed
11/4/2011	12:03:17 PM	SiCl4 post valve closed
11/4/2011	12:03:17 PM	Main Vac valve closed
11/4/2011	12:03:17 PM	Bubbler valve closed
11/4/2011	12:03:17 PM	Bypass valve closed
11/4/2011	12:03:17 PM	Helium MFC set to  0.000000
11/4/2011	12:03:17 PM	H2 MFC set to  0.000000
11/4/2011	12:03:17 PM	BCl3 MFC set to  0.000000
11/4/2011	12:03:17 PM	PHl3 MFC set to  0.000000
11/4/2011	12:03:17 PM	SiCl4 MFC set to  0.000000
11/4/2011	12:03:17 PM	Bypass solenoid MFC set to  760.000000
11/4/2011	12:03:17 PM	Tube furnace set to 0
11/4/2011	12:03:17 PM	Baratron reads 902.609148 Torr.  Emergency exit.
11/4/2011	12:03:29 PM	Program exited cleanly
11/4/2011	12:03:34 PM	Helium valve closed
11/4/2011	12:03:34 PM	H2 valve closed
11/4/2011	12:03:34 PM	BCl3 valve closed
11/4/2011	12:03:34 PM	PH3 valve closed
11/4/2011	12:03:34 PM	SiCl4 pre valve closed
11/4/2011	12:03:34 PM	SiCl4 post valve closed
11/4/2011	12:03:34 PM	Main Vac valve closed
11/4/2011	12:03:34 PM	Bypass valve closed
11/4/2011	12:03:34 PM	Bubbler valve closed
11/4/2011	12:03:34 PM	Helium MFC set to  0.000000
11/4/2011	12:03:34 PM	H2 MFC set to  0.000000
11/4/2011	12:03:34 PM	BCl3 MFC set to  0.000000
11/4/2011	12:03:34 PM	PHl3 MFC set to  0.000000
11/4/2011	12:03:34 PM	SiCl4 MFC set to  0.000000
11/4/2011	12:03:34 PM	Bypass solenoid MFC set to  760.000000
11/4/2011	12:03:35 PM	Tube furnace set to 0
11/4/2011	12:03:35 PM	Bypass valve opened
11/4/2011	12:03:37 PM	Bypass valve closed
11/4/2011	12:03:45 PM	H2 MFC set to  100.000000
11/4/2011	12:03:48 PM	SiCl4 MFC set to  100.000000
11/4/2011	12:03:51 PM	H2 valve opened
11/4/2011	12:03:53 PM	SiCl4 post valve opened
11/4/2011	12:03:53 PM	SiCl4 pre valve opened
11/4/2011	12:04:05 PM	H2 MFC set to  500.000000
11/4/2011	12:04:11 PM	Bubbler valve opened
11/4/2011	12:47:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
11/4/2011	12:47:34 PM	Recipe started at 12:47 PM
11/4/2011	12:47:34 PM	Helium valve closed
11/4/2011	12:47:34 PM	H2 valve closed
11/4/2011	12:47:34 PM	BCl3 valve closed
11/4/2011	12:47:34 PM	PH3 valve closed
11/4/2011	12:47:34 PM	SiCl4 pre valve closed
11/4/2011	12:47:34 PM	SiCl4 post valve closed
11/4/2011	12:47:34 PM	Main Vac valve closed
11/4/2011	12:47:34 PM	Bypass valve closed
11/4/2011	12:47:34 PM	Bubbler valve closed
11/4/2011	12:47:34 PM	Helium MFC set to  0.000000
11/4/2011	12:47:34 PM	H2 MFC set to  0.000000
11/4/2011	12:47:34 PM	BCl3 MFC set to  0.000000
11/4/2011	12:47:34 PM	PHl3 MFC set to  0.000000
11/4/2011	12:47:34 PM	SiCl4 MFC set to  0.000000
11/4/2011	12:47:34 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	12:47:35 PM	Tube furnace set to 0
11/4/2011	12:47:35 PM	Run finished at 12:47 PM
11/4/2011	12:47:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
11/4/2011	12:47:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/4/2011	12:47:38 PM	Recipe started at 12:47 PM
11/4/2011	12:47:38 PM	Helium valve closed
11/4/2011	12:47:38 PM	H2 valve closed
11/4/2011	12:47:38 PM	BCl3 valve closed
11/4/2011	12:47:38 PM	PH3 valve closed
11/4/2011	12:47:38 PM	SiCl4 pre valve closed
11/4/2011	12:47:38 PM	SiCl4 post valve closed
11/4/2011	12:47:38 PM	Main Vac valve closed
11/4/2011	12:47:38 PM	Bubbler valve closed
11/4/2011	12:47:38 PM	Bypass valve opened
11/4/2011	12:47:38 PM	Helium MFC set to  0.000000
11/4/2011	12:47:38 PM	H2 MFC set to  0.000000
11/4/2011	12:47:38 PM	BCl3 MFC set to  0.000000
11/4/2011	12:47:38 PM	PHl3 MFC set to  0.000000
11/4/2011	12:47:38 PM	SiCl4 MFC set to  0.000000
11/4/2011	12:47:38 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	12:47:38 PM	Tube furnace set to 0
11/4/2011	12:48:11 PM	Helium valve closed
11/4/2011	12:48:11 PM	H2 valve closed
11/4/2011	12:48:11 PM	BCl3 valve closed
11/4/2011	12:48:11 PM	PH3 valve closed
11/4/2011	12:48:11 PM	SiCl4 pre valve closed
11/4/2011	12:48:11 PM	SiCl4 post valve closed
11/4/2011	12:48:11 PM	Main Vac valve closed
11/4/2011	12:48:11 PM	Bubbler valve closed
11/4/2011	12:48:11 PM	Bypass valve opened
11/4/2011	12:48:11 PM	Helium MFC set to  0.000000
11/4/2011	12:48:11 PM	H2 MFC set to  0.000000
11/4/2011	12:48:11 PM	BCl3 MFC set to  0.000000
11/4/2011	12:48:11 PM	PHl3 MFC set to  0.000000
11/4/2011	12:48:11 PM	SiCl4 MFC set to  0.000000
11/4/2011	12:48:11 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	12:48:12 PM	Tube furnace set to 0
11/4/2011	12:49:12 PM	Helium valve closed
11/4/2011	12:49:12 PM	H2 valve closed
11/4/2011	12:49:12 PM	BCl3 valve closed
11/4/2011	12:49:12 PM	PH3 valve closed
11/4/2011	12:49:12 PM	SiCl4 pre valve closed
11/4/2011	12:49:12 PM	SiCl4 post valve closed
11/4/2011	12:49:12 PM	Bypass valve closed
11/4/2011	12:49:12 PM	Bubbler valve closed
11/4/2011	12:49:12 PM	Main Vac valve opened
11/4/2011	12:49:12 PM	Helium MFC set to  0.000000
11/4/2011	12:49:12 PM	H2 MFC set to  0.000000
11/4/2011	12:49:12 PM	BCl3 MFC set to  0.000000
11/4/2011	12:49:12 PM	PHl3 MFC set to  0.000000
11/4/2011	12:49:12 PM	SiCl4 MFC set to  0.000000
11/4/2011	12:49:12 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	12:49:12 PM	Tube furnace set to 0
11/4/2011	12:49:13 PM	Run finished at 12:49 PM
11/4/2011	12:49:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/4/2011	3:09:37 PM	Main Vac valve closed
11/4/2011	3:09:41 PM	H2 MFC set to  500.000000
11/4/2011	3:09:43 PM	H2 valve opened
11/4/2011	3:09:48 PM	SiCl4 MFC set to  100.000000
11/4/2011	3:09:49 PM	SiCl4 pre valve opened
11/4/2011	3:09:49 PM	SiCl4 post valve opened
11/4/2011	3:10:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
11/4/2011	3:10:43 PM	Recipe started at 3:10 PM
11/4/2011	3:10:43 PM	Helium valve closed
11/4/2011	3:10:43 PM	H2 valve closed
11/4/2011	3:10:43 PM	BCl3 valve closed
11/4/2011	3:10:43 PM	PH3 valve closed
11/4/2011	3:10:43 PM	SiCl4 pre valve closed
11/4/2011	3:10:43 PM	SiCl4 post valve closed
11/4/2011	3:10:43 PM	Main Vac valve closed
11/4/2011	3:10:43 PM	Bypass valve closed
11/4/2011	3:10:43 PM	Bubbler valve closed
11/4/2011	3:10:43 PM	Helium MFC set to  0.000000
11/4/2011	3:10:43 PM	H2 MFC set to  0.000000
11/4/2011	3:10:43 PM	BCl3 MFC set to  0.000000
11/4/2011	3:10:43 PM	PHl3 MFC set to  0.000000
11/4/2011	3:10:43 PM	SiCl4 MFC set to  0.000000
11/4/2011	3:10:43 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	3:10:43 PM	Tube furnace set to 0
11/4/2011	3:10:43 PM	Run finished at 3:10 PM
11/4/2011	3:10:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
11/4/2011	3:11:13 PM	Bypass valve opened
11/4/2011	3:11:58 PM	Bypass valve closed
11/4/2011	3:11:59 PM	Main Vac valve opened
11/4/2011	3:12:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/4/2011	3:12:19 PM	Recipe started at 3:12 PM
11/4/2011	3:12:19 PM	Helium valve closed
11/4/2011	3:12:19 PM	H2 valve closed
11/4/2011	3:12:19 PM	BCl3 valve closed
11/4/2011	3:12:19 PM	PH3 valve closed
11/4/2011	3:12:19 PM	SiCl4 pre valve closed
11/4/2011	3:12:19 PM	SiCl4 post valve closed
11/4/2011	3:12:19 PM	Main Vac valve closed
11/4/2011	3:12:19 PM	Bypass valve closed
11/4/2011	3:12:19 PM	Bubbler valve closed
11/4/2011	3:12:19 PM	Helium MFC set to  0.000000
11/4/2011	3:12:19 PM	H2 MFC set to  0.000000
11/4/2011	3:12:19 PM	BCl3 MFC set to  0.000000
11/4/2011	3:12:19 PM	PHl3 MFC set to  0.000000
11/4/2011	3:12:19 PM	SiCl4 MFC set to  0.000000
11/4/2011	3:12:19 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	3:12:19 PM	Tube furnace set to 0
11/4/2011	3:12:22 PM	H2 valve closed
11/4/2011	3:12:22 PM	BCl3 valve closed
11/4/2011	3:12:22 PM	PH3 valve closed
11/4/2011	3:12:22 PM	SiCl4 pre valve closed
11/4/2011	3:12:22 PM	SiCl4 post valve closed
11/4/2011	3:12:22 PM	Main Vac valve closed
11/4/2011	3:12:22 PM	Bypass valve closed
11/4/2011	3:12:22 PM	Bubbler valve closed
11/4/2011	3:12:22 PM	Helium valve opened
11/4/2011	3:12:22 PM	Helium MFC set to  500.000000
11/4/2011	3:12:22 PM	H2 MFC set to  0.000000
11/4/2011	3:12:22 PM	BCl3 MFC set to  0.000000
11/4/2011	3:12:22 PM	PHl3 MFC set to  0.000000
11/4/2011	3:12:22 PM	SiCl4 MFC set to  0.000000
11/4/2011	3:12:22 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	3:12:23 PM	Tube furnace set to 0
11/4/2011	3:13:28 PM	Helium valve closed
11/4/2011	3:13:28 PM	H2 valve closed
11/4/2011	3:13:28 PM	BCl3 valve closed
11/4/2011	3:13:28 PM	PH3 valve closed
11/4/2011	3:13:28 PM	SiCl4 pre valve closed
11/4/2011	3:13:28 PM	SiCl4 post valve closed
11/4/2011	3:13:28 PM	Main Vac valve closed
11/4/2011	3:13:28 PM	Bypass valve closed
11/4/2011	3:13:28 PM	Bubbler valve closed
11/4/2011	3:13:28 PM	Helium MFC set to  0.000000
11/4/2011	3:13:28 PM	H2 MFC set to  0.000000
11/4/2011	3:13:28 PM	BCl3 MFC set to  0.000000
11/4/2011	3:13:28 PM	PHl3 MFC set to  0.000000
11/4/2011	3:13:28 PM	SiCl4 MFC set to  0.000000
11/4/2011	3:13:28 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	3:13:28 PM	Tube furnace set to 0
11/4/2011	3:13:29 PM	Run finished at 3:13 PM
11/4/2011	3:13:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/4/2011	3:15:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/4/2011	3:15:57 PM	Recipe started at 3:15 PM
11/4/2011	3:15:57 PM	Helium valve closed
11/4/2011	3:15:57 PM	H2 valve closed
11/4/2011	3:15:57 PM	BCl3 valve closed
11/4/2011	3:15:57 PM	PH3 valve closed
11/4/2011	3:15:57 PM	SiCl4 pre valve closed
11/4/2011	3:15:57 PM	SiCl4 post valve closed
11/4/2011	3:15:57 PM	Main Vac valve closed
11/4/2011	3:15:57 PM	Bubbler valve closed
11/4/2011	3:15:57 PM	Bypass valve opened
11/4/2011	3:15:57 PM	Helium MFC set to  0.000000
11/4/2011	3:15:57 PM	H2 MFC set to  0.000000
11/4/2011	3:15:57 PM	BCl3 MFC set to  0.000000
11/4/2011	3:15:57 PM	PHl3 MFC set to  0.000000
11/4/2011	3:15:57 PM	SiCl4 MFC set to  0.000000
11/4/2011	3:15:57 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	3:15:57 PM	Tube furnace set to 0
11/4/2011	3:16:58 PM	Helium valve closed
11/4/2011	3:16:58 PM	H2 valve closed
11/4/2011	3:16:58 PM	BCl3 valve closed
11/4/2011	3:16:58 PM	PH3 valve closed
11/4/2011	3:16:58 PM	SiCl4 pre valve closed
11/4/2011	3:16:58 PM	SiCl4 post valve closed
11/4/2011	3:16:58 PM	Main Vac valve closed
11/4/2011	3:16:58 PM	Bubbler valve closed
11/4/2011	3:16:58 PM	Bypass valve opened
11/4/2011	3:16:58 PM	Helium MFC set to  0.000000
11/4/2011	3:16:58 PM	H2 MFC set to  0.000000
11/4/2011	3:16:58 PM	BCl3 MFC set to  0.000000
11/4/2011	3:16:58 PM	PHl3 MFC set to  0.000000
11/4/2011	3:16:58 PM	SiCl4 MFC set to  0.000000
11/4/2011	3:16:58 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	3:16:59 PM	Tube furnace set to 0
11/4/2011	3:17:59 PM	Helium valve closed
11/4/2011	3:17:59 PM	H2 valve closed
11/4/2011	3:17:59 PM	BCl3 valve closed
11/4/2011	3:17:59 PM	PH3 valve closed
11/4/2011	3:17:59 PM	SiCl4 pre valve closed
11/4/2011	3:17:59 PM	SiCl4 post valve closed
11/4/2011	3:17:59 PM	Bypass valve closed
11/4/2011	3:17:59 PM	Bubbler valve closed
11/4/2011	3:17:59 PM	Main Vac valve opened
11/4/2011	3:17:59 PM	Helium MFC set to  0.000000
11/4/2011	3:17:59 PM	H2 MFC set to  0.000000
11/4/2011	3:17:59 PM	BCl3 MFC set to  0.000000
11/4/2011	3:17:59 PM	PHl3 MFC set to  0.000000
11/4/2011	3:17:59 PM	SiCl4 MFC set to  0.000000
11/4/2011	3:17:59 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	3:17:59 PM	Tube furnace set to 0
11/4/2011	3:18:00 PM	Run finished at 3:18 PM
11/4/2011	3:18:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/4/2011	3:50:54 PM	Helium MFC set to  20.000000
11/4/2011	3:50:55 PM	Helium valve opened
11/4/2011	3:52:32 PM	Tube furnace set to 50
11/4/2011	3:52:33 PM	Helium valve closed
11/4/2011	3:53:16 PM	Main Vac valve closed
11/4/2011	3:53:39 PM	Main Vac valve opened
11/4/2011	4:08:01 PM	Recipe started at 4:07 PM
11/4/2011	4:08:01 PM	Helium valve closed
11/4/2011	4:08:01 PM	H2 valve closed
11/4/2011	4:08:01 PM	BCl3 valve closed
11/4/2011	4:08:01 PM	PH3 valve closed
11/4/2011	4:08:01 PM	SiCl4 pre valve closed
11/4/2011	4:08:01 PM	SiCl4 post valve closed
11/4/2011	4:08:01 PM	Main Vac valve closed
11/4/2011	4:08:01 PM	Bypass valve closed
11/4/2011	4:08:01 PM	Bubbler valve closed
11/4/2011	4:08:01 PM	Helium MFC set to  0.000000
11/4/2011	4:08:01 PM	H2 MFC set to  0.000000
11/4/2011	4:08:01 PM	BCl3 MFC set to  0.000000
11/4/2011	4:08:01 PM	PHl3 MFC set to  0.000000
11/4/2011	4:08:01 PM	SiCl4 MFC set to  0.000000
11/4/2011	4:08:01 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	4:08:01 PM	Tube furnace set to 0
11/4/2011	4:08:04 PM	Helium valve closed
11/4/2011	4:08:04 PM	BCl3 valve closed
11/4/2011	4:08:04 PM	PH3 valve closed
11/4/2011	4:08:04 PM	SiCl4 pre valve closed
11/4/2011	4:08:04 PM	SiCl4 post valve closed
11/4/2011	4:08:04 PM	Main Vac valve closed
11/4/2011	4:08:04 PM	Bypass valve closed
11/4/2011	4:08:04 PM	Bubbler valve closed
11/4/2011	4:08:04 PM	H2 valve opened
11/4/2011	4:08:04 PM	Helium MFC set to  0.000000
11/4/2011	4:08:04 PM	H2 MFC set to  500.000000
11/4/2011	4:08:04 PM	BCl3 MFC set to  0.000000
11/4/2011	4:08:04 PM	PHl3 MFC set to  0.000000
11/4/2011	4:08:04 PM	SiCl4 MFC set to  0.000000
11/4/2011	4:08:04 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	4:08:04 PM	Tube furnace set to 100
11/4/2011	4:09:11 PM	Helium valve closed
11/4/2011	4:09:11 PM	BCl3 valve closed
11/4/2011	4:09:11 PM	PH3 valve closed
11/4/2011	4:09:11 PM	SiCl4 pre valve closed
11/4/2011	4:09:11 PM	SiCl4 post valve closed
11/4/2011	4:09:11 PM	Main Vac valve closed
11/4/2011	4:09:11 PM	Bypass valve closed
11/4/2011	4:09:11 PM	H2 valve opened
11/4/2011	4:09:11 PM	Bubbler valve opened
11/4/2011	4:09:11 PM	Helium MFC set to  0.000000
11/4/2011	4:09:11 PM	H2 MFC set to  500.000000
11/4/2011	4:09:11 PM	BCl3 MFC set to  0.000000
11/4/2011	4:09:11 PM	PHl3 MFC set to  0.000000
11/4/2011	4:09:11 PM	SiCl4 MFC set to  0.000000
11/4/2011	4:09:11 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	4:09:11 PM	Tube furnace set to 1010
11/4/2011	4:09:12 PM	Helium valve closed
11/4/2011	4:09:12 PM	BCl3 valve closed
11/4/2011	4:09:12 PM	PH3 valve closed
11/4/2011	4:09:12 PM	SiCl4 pre valve closed
11/4/2011	4:09:12 PM	SiCl4 post valve closed
11/4/2011	4:09:12 PM	Main Vac valve closed
11/4/2011	4:09:12 PM	Bypass valve closed
11/4/2011	4:09:12 PM	H2 valve opened
11/4/2011	4:09:12 PM	Bubbler valve opened
11/4/2011	4:09:12 PM	Helium MFC set to  0.000000
11/4/2011	4:09:12 PM	H2 MFC set to  500.000000
11/4/2011	4:09:12 PM	BCl3 MFC set to  0.000000
11/4/2011	4:09:12 PM	PHl3 MFC set to  0.000000
11/4/2011	4:09:12 PM	SiCl4 MFC set to  0.000000
11/4/2011	4:09:12 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	4:09:12 PM	Tube furnace set to 1010
11/4/2011	4:33:12 PM	Helium valve closed
11/4/2011	4:33:12 PM	PH3 valve closed
11/4/2011	4:33:12 PM	Main Vac valve closed
11/4/2011	4:33:12 PM	Bypass valve closed
11/4/2011	4:33:12 PM	H2 valve opened
11/4/2011	4:33:12 PM	BCl3 valve opened
11/4/2011	4:33:12 PM	SiCl4 pre valve opened
11/4/2011	4:33:12 PM	SiCl4 post valve opened
11/4/2011	4:33:12 PM	Bubbler valve opened
11/4/2011	4:33:12 PM	Helium MFC set to  0.000000
11/4/2011	4:33:12 PM	H2 MFC set to  500.000000
11/4/2011	4:33:12 PM	BCl3 MFC set to  2.000000
11/4/2011	4:33:12 PM	PHl3 MFC set to  0.000000
11/4/2011	4:33:12 PM	SiCl4 MFC set to  50.000000
11/4/2011	4:33:12 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	4:33:13 PM	Tube furnace set to 1010
11/4/2011	4:43:13 PM	Helium valve closed
11/4/2011	4:43:13 PM	BCl3 valve closed
11/4/2011	4:43:13 PM	PH3 valve closed
11/4/2011	4:43:13 PM	SiCl4 pre valve closed
11/4/2011	4:43:13 PM	SiCl4 post valve closed
11/4/2011	4:43:13 PM	Main Vac valve closed
11/4/2011	4:43:13 PM	Bypass valve closed
11/4/2011	4:43:13 PM	H2 valve opened
11/4/2011	4:43:13 PM	Bubbler valve opened
11/4/2011	4:43:13 PM	Helium MFC set to  0.000000
11/4/2011	4:43:13 PM	H2 MFC set to  500.000000
11/4/2011	4:43:13 PM	BCl3 MFC set to  0.000000
11/4/2011	4:43:13 PM	PHl3 MFC set to  0.000000
11/4/2011	4:43:13 PM	SiCl4 MFC set to  0.000000
11/4/2011	4:43:13 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	4:43:13 PM	Tube furnace set to 750
11/4/2011	4:53:13 PM	H2 valve closed
11/4/2011	4:53:13 PM	BCl3 valve closed
11/4/2011	4:53:13 PM	PH3 valve closed
11/4/2011	4:53:13 PM	SiCl4 pre valve closed
11/4/2011	4:53:13 PM	SiCl4 post valve closed
11/4/2011	4:53:13 PM	Main Vac valve closed
11/4/2011	4:53:13 PM	Bypass valve closed
11/4/2011	4:53:13 PM	Helium valve opened
11/4/2011	4:53:13 PM	Bubbler valve opened
11/4/2011	4:53:13 PM	Helium MFC set to  400.000000
11/4/2011	4:53:13 PM	H2 MFC set to  0.000000
11/4/2011	4:53:13 PM	BCl3 MFC set to  0.000000
11/4/2011	4:53:13 PM	PHl3 MFC set to  0.000000
11/4/2011	4:53:13 PM	SiCl4 MFC set to  0.000000
11/4/2011	4:53:13 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	4:53:13 PM	Tube furnace set to 0
11/4/2011	5:07:46 PM	Helium valve closed
11/4/2011	5:07:46 PM	H2 valve closed
11/4/2011	5:07:47 PM	BCl3 valve closed
11/4/2011	5:07:47 PM	PH3 valve closed
11/4/2011	5:07:47 PM	SiCl4 pre valve closed
11/4/2011	5:07:47 PM	SiCl4 post valve closed
11/4/2011	5:07:47 PM	Main Vac valve closed
11/4/2011	5:07:47 PM	Bypass valve closed
11/4/2011	5:07:47 PM	Bubbler valve closed
11/4/2011	5:07:47 PM	Helium MFC set to  0.000000
11/4/2011	5:07:47 PM	H2 MFC set to  0.000000
11/4/2011	5:07:47 PM	BCl3 MFC set to  0.000000
11/4/2011	5:07:47 PM	PHl3 MFC set to  0.000000
11/4/2011	5:07:47 PM	SiCl4 MFC set to  0.000000
11/4/2011	5:07:47 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	5:07:47 PM	Tube furnace set to 0
11/4/2011	5:12:04 PM	Run finished at 5:12 PM
11/4/2011	5:12:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/4/2011	5:12:08 PM	Recipe started at 5:12 PM
11/4/2011	5:12:08 PM	Helium valve closed
11/4/2011	5:12:08 PM	H2 valve closed
11/4/2011	5:12:08 PM	BCl3 valve closed
11/4/2011	5:12:08 PM	PH3 valve closed
11/4/2011	5:12:08 PM	SiCl4 pre valve closed
11/4/2011	5:12:08 PM	SiCl4 post valve closed
11/4/2011	5:12:08 PM	Main Vac valve closed
11/4/2011	5:12:08 PM	Bubbler valve closed
11/4/2011	5:12:08 PM	Bypass valve opened
11/4/2011	5:12:08 PM	Helium MFC set to  0.000000
11/4/2011	5:12:08 PM	H2 MFC set to  0.000000
11/4/2011	5:12:08 PM	BCl3 MFC set to  0.000000
11/4/2011	5:12:08 PM	PHl3 MFC set to  0.000000
11/4/2011	5:12:08 PM	SiCl4 MFC set to  0.000000
11/4/2011	5:12:08 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	5:12:08 PM	Tube furnace set to 0
11/4/2011	5:13:11 PM	Helium valve closed
11/4/2011	5:13:11 PM	H2 valve closed
11/4/2011	5:13:11 PM	BCl3 valve closed
11/4/2011	5:13:11 PM	PH3 valve closed
11/4/2011	5:13:11 PM	SiCl4 pre valve closed
11/4/2011	5:13:11 PM	SiCl4 post valve closed
11/4/2011	5:13:11 PM	Main Vac valve closed
11/4/2011	5:13:11 PM	Bubbler valve closed
11/4/2011	5:13:11 PM	Bypass valve opened
11/4/2011	5:13:11 PM	Helium MFC set to  0.000000
11/4/2011	5:13:11 PM	H2 MFC set to  0.000000
11/4/2011	5:13:11 PM	BCl3 MFC set to  0.000000
11/4/2011	5:13:11 PM	PHl3 MFC set to  0.000000
11/4/2011	5:13:11 PM	SiCl4 MFC set to  0.000000
11/4/2011	5:13:11 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	5:13:11 PM	Tube furnace set to 0
11/4/2011	5:14:11 PM	Helium valve closed
11/4/2011	5:14:11 PM	H2 valve closed
11/4/2011	5:14:11 PM	BCl3 valve closed
11/4/2011	5:14:11 PM	PH3 valve closed
11/4/2011	5:14:11 PM	SiCl4 pre valve closed
11/4/2011	5:14:11 PM	SiCl4 post valve closed
11/4/2011	5:14:11 PM	Bypass valve closed
11/4/2011	5:14:11 PM	Bubbler valve closed
11/4/2011	5:14:11 PM	Main Vac valve opened
11/4/2011	5:14:11 PM	Helium MFC set to  0.000000
11/4/2011	5:14:11 PM	H2 MFC set to  0.000000
11/4/2011	5:14:11 PM	BCl3 MFC set to  0.000000
11/4/2011	5:14:11 PM	PHl3 MFC set to  0.000000
11/4/2011	5:14:11 PM	SiCl4 MFC set to  0.000000
11/4/2011	5:14:11 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	5:14:12 PM	Tube furnace set to 0
11/4/2011	5:14:13 PM	Run finished at 5:14 PM
11/4/2011	5:14:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/4/2011	5:38:07 PM	Program exited cleanly
11/4/2011	5:53:07 PM	Helium valve closed
11/4/2011	5:53:07 PM	H2 valve closed
11/4/2011	5:53:07 PM	BCl3 valve closed
11/4/2011	5:53:07 PM	PH3 valve closed
11/4/2011	5:53:07 PM	SiCl4 pre valve closed
11/4/2011	5:53:07 PM	SiCl4 post valve closed
11/4/2011	5:53:07 PM	Main Vac valve closed
11/4/2011	5:53:07 PM	Bypass valve closed
11/4/2011	5:53:07 PM	Bubbler valve closed
11/4/2011	5:53:07 PM	Helium MFC set to  0.000000
11/4/2011	5:53:07 PM	H2 MFC set to  0.000000
11/4/2011	5:53:07 PM	BCl3 MFC set to  0.000000
11/4/2011	5:53:07 PM	PHl3 MFC set to  0.000000
11/4/2011	5:53:07 PM	SiCl4 MFC set to  0.000000
11/4/2011	5:53:07 PM	Bypass solenoid MFC set to  760.000000
11/4/2011	5:53:08 PM	Tube furnace set to 0
11/4/2011	5:57:48 PM	Helium MFC set to  0.000000
11/4/2011	5:57:55 PM	Main Vac valve opened
11/4/2011	5:58:10 PM	Helium MFC set to  20.000000
11/4/2011	5:58:11 PM	Helium valve opened
11/4/2011	5:59:38 PM	Helium valve closed
11/4/2011	5:59:40 PM	Helium MFC set to  0.000000
11/4/2011	6:00:05 PM	Main Vac valve closed
11/4/2011	6:00:30 PM	Main Vac valve opened
11/4/2011	6:00:35 PM	Helium MFC set to  20.000000
11/4/2011	6:00:37 PM	Helium valve opened
11/4/2011	6:02:41 PM	Helium valve closed
11/4/2011	6:03:40 PM	Helium MFC set to  20.000000
11/4/2011	6:03:45 PM	Helium MFC set to  0.000000
11/4/2011	6:03:51 PM	Main Vac valve closed
11/4/2011	6:04:13 PM	Main Vac valve opened
11/4/2011	6:05:22 PM	Recipe started at 6:05 PM
11/4/2011	6:05:22 PM	Helium valve closed
11/4/2011	6:05:22 PM	H2 valve closed
11/4/2011	6:05:22 PM	BCl3 valve closed
11/4/2011	6:05:22 PM	PH3 valve closed
11/4/2011	6:05:22 PM	SiCl4 pre valve closed
11/4/2011	6:05:22 PM	SiCl4 post valve closed
11/4/2011	6:05:22 PM	Main Vac valve closed
11/4/2011	6:05:22 PM	Bypass valve closed
11/4/2011	6:05:23 PM	Bubbler valve closed
11/4/2011	6:05:23 PM	Helium MFC set to  0.000000
11/4/2011	6:05:23 PM	H2 MFC set to  0.000000
11/4/2011	6:05:23 PM	BCl3 MFC set to  0.000000
11/4/2011	6:05:23 PM	PHl3 MFC set to  0.000000
11/4/2011	6:05:23 PM	SiCl4 MFC set to  0.000000
11/4/2011	6:05:23 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	6:05:23 PM	Tube furnace set to 0
11/4/2011	6:05:26 PM	Helium valve closed
11/4/2011	6:05:26 PM	BCl3 valve closed
11/4/2011	6:05:26 PM	PH3 valve closed
11/4/2011	6:05:26 PM	SiCl4 pre valve closed
11/4/2011	6:05:26 PM	SiCl4 post valve closed
11/4/2011	6:05:26 PM	Main Vac valve closed
11/4/2011	6:05:26 PM	Bypass valve closed
11/4/2011	6:05:26 PM	Bubbler valve closed
11/4/2011	6:05:26 PM	H2 valve opened
11/4/2011	6:05:26 PM	Helium MFC set to  0.000000
11/4/2011	6:05:26 PM	H2 MFC set to  500.000000
11/4/2011	6:05:26 PM	BCl3 MFC set to  0.000000
11/4/2011	6:05:26 PM	PHl3 MFC set to  0.000000
11/4/2011	6:05:26 PM	SiCl4 MFC set to  0.000000
11/4/2011	6:05:26 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	6:05:26 PM	Tube furnace set to 100
11/4/2011	6:06:32 PM	Helium valve closed
11/4/2011	6:06:32 PM	BCl3 valve closed
11/4/2011	6:06:32 PM	PH3 valve closed
11/4/2011	6:06:32 PM	SiCl4 pre valve closed
11/4/2011	6:06:32 PM	SiCl4 post valve closed
11/4/2011	6:06:32 PM	Main Vac valve closed
11/4/2011	6:06:32 PM	Bypass valve closed
11/4/2011	6:06:32 PM	H2 valve opened
11/4/2011	6:06:32 PM	Bubbler valve opened
11/4/2011	6:06:32 PM	Helium MFC set to  0.000000
11/4/2011	6:06:32 PM	H2 MFC set to  500.000000
11/4/2011	6:06:32 PM	BCl3 MFC set to  0.000000
11/4/2011	6:06:32 PM	PHl3 MFC set to  0.000000
11/4/2011	6:06:32 PM	SiCl4 MFC set to  0.000000
11/4/2011	6:06:32 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	6:06:32 PM	Tube furnace set to 1000
11/4/2011	6:06:33 PM	Helium valve closed
11/4/2011	6:06:33 PM	BCl3 valve closed
11/4/2011	6:06:33 PM	PH3 valve closed
11/4/2011	6:06:33 PM	SiCl4 pre valve closed
11/4/2011	6:06:33 PM	SiCl4 post valve closed
11/4/2011	6:06:33 PM	Main Vac valve closed
11/4/2011	6:06:33 PM	Bypass valve closed
11/4/2011	6:06:33 PM	H2 valve opened
11/4/2011	6:06:33 PM	Bubbler valve opened
11/4/2011	6:06:33 PM	Helium MFC set to  0.000000
11/4/2011	6:06:33 PM	H2 MFC set to  500.000000
11/4/2011	6:06:33 PM	BCl3 MFC set to  0.000000
11/4/2011	6:06:33 PM	PHl3 MFC set to  0.000000
11/4/2011	6:06:33 PM	SiCl4 MFC set to  0.000000
11/4/2011	6:06:33 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	6:06:33 PM	Tube furnace set to 1000
11/4/2011	6:30:33 PM	Helium valve closed
11/4/2011	6:30:33 PM	PH3 valve closed
11/4/2011	6:30:33 PM	Main Vac valve closed
11/4/2011	6:30:33 PM	Bypass valve closed
11/4/2011	6:30:33 PM	H2 valve opened
11/4/2011	6:30:33 PM	BCl3 valve opened
11/4/2011	6:30:33 PM	SiCl4 pre valve opened
11/4/2011	6:30:33 PM	SiCl4 post valve opened
11/4/2011	6:30:33 PM	Bubbler valve opened
11/4/2011	6:30:33 PM	Helium MFC set to  0.000000
11/4/2011	6:30:33 PM	H2 MFC set to  500.000000
11/4/2011	6:30:33 PM	BCl3 MFC set to  2.000000
11/4/2011	6:30:33 PM	PHl3 MFC set to  0.000000
11/4/2011	6:30:33 PM	SiCl4 MFC set to  20.000000
11/4/2011	6:30:33 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	6:30:33 PM	Tube furnace set to 1010
11/4/2011	6:32:33 PM	Helium valve closed
11/4/2011	6:32:33 PM	BCl3 valve closed
11/4/2011	6:32:33 PM	PH3 valve closed
11/4/2011	6:32:33 PM	SiCl4 pre valve closed
11/4/2011	6:32:33 PM	SiCl4 post valve closed
11/4/2011	6:32:33 PM	Main Vac valve closed
11/4/2011	6:32:33 PM	Bypass valve closed
11/4/2011	6:32:33 PM	H2 valve opened
11/4/2011	6:32:33 PM	Bubbler valve opened
11/4/2011	6:32:33 PM	Helium MFC set to  0.000000
11/4/2011	6:32:33 PM	H2 MFC set to  500.000000
11/4/2011	6:32:33 PM	BCl3 MFC set to  0.000000
11/4/2011	6:32:33 PM	PHl3 MFC set to  0.000000
11/4/2011	6:32:33 PM	SiCl4 MFC set to  0.000000
11/4/2011	6:32:33 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	6:32:34 PM	Tube furnace set to 1000
11/4/2011	6:34:59 PM	H2 valve closed
11/4/2011	6:34:59 PM	BCl3 valve closed
11/4/2011	6:34:59 PM	PH3 valve closed
11/4/2011	6:34:59 PM	SiCl4 pre valve closed
11/4/2011	6:34:59 PM	SiCl4 post valve closed
11/4/2011	6:34:59 PM	Main Vac valve closed
11/4/2011	6:34:59 PM	Bypass valve closed
11/4/2011	6:34:59 PM	Helium valve opened
11/4/2011	6:34:59 PM	Bubbler valve opened
11/4/2011	6:34:59 PM	Helium MFC set to  400.000000
11/4/2011	6:34:59 PM	H2 MFC set to  0.000000
11/4/2011	6:34:59 PM	BCl3 MFC set to  0.000000
11/4/2011	6:34:59 PM	PHl3 MFC set to  0.000000
11/4/2011	6:34:59 PM	SiCl4 MFC set to  0.000000
11/4/2011	6:34:59 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	6:34:59 PM	Tube furnace set to 0
11/4/2011	6:54:59 PM	Helium valve closed
11/4/2011	6:54:59 PM	H2 valve closed
11/4/2011	6:54:59 PM	BCl3 valve closed
11/4/2011	6:54:59 PM	PH3 valve closed
11/4/2011	6:54:59 PM	SiCl4 pre valve closed
11/4/2011	6:54:59 PM	SiCl4 post valve closed
11/4/2011	6:54:59 PM	Main Vac valve closed
11/4/2011	6:54:59 PM	Bypass valve closed
11/4/2011	6:54:59 PM	Bubbler valve closed
11/4/2011	6:54:59 PM	Helium MFC set to  0.000000
11/4/2011	6:54:59 PM	H2 MFC set to  0.000000
11/4/2011	6:54:59 PM	BCl3 MFC set to  0.000000
11/4/2011	6:54:59 PM	PHl3 MFC set to  0.000000
11/4/2011	6:54:59 PM	SiCl4 MFC set to  0.000000
11/4/2011	6:54:59 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	6:54:59 PM	Tube furnace set to 0
11/4/2011	6:59:59 PM	Helium valve closed
11/4/2011	6:59:59 PM	H2 valve closed
11/4/2011	6:59:59 PM	BCl3 valve closed
11/4/2011	6:59:59 PM	PH3 valve closed
11/4/2011	6:59:59 PM	SiCl4 pre valve closed
11/4/2011	6:59:59 PM	SiCl4 post valve closed
11/4/2011	6:59:59 PM	Main Vac valve closed
11/4/2011	6:59:59 PM	Bubbler valve closed
11/4/2011	6:59:59 PM	Bypass valve opened
11/4/2011	6:59:59 PM	Helium MFC set to  0.000000
11/4/2011	6:59:59 PM	H2 MFC set to  0.000000
11/4/2011	6:59:59 PM	BCl3 MFC set to  0.000000
11/4/2011	6:59:59 PM	PHl3 MFC set to  0.000000
11/4/2011	6:59:59 PM	SiCl4 MFC set to  0.000000
11/4/2011	6:59:59 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	6:59:59 PM	Tube furnace set to 0
11/4/2011	7:00:59 PM	Helium valve closed
11/4/2011	7:00:59 PM	H2 valve closed
11/4/2011	7:00:59 PM	BCl3 valve closed
11/4/2011	7:00:59 PM	PH3 valve closed
11/4/2011	7:00:59 PM	SiCl4 pre valve closed
11/4/2011	7:00:59 PM	SiCl4 post valve closed
11/4/2011	7:00:59 PM	Main Vac valve closed
11/4/2011	7:00:59 PM	Bypass valve closed
11/4/2011	7:00:59 PM	Bubbler valve closed
11/4/2011	7:00:59 PM	Helium MFC set to  0.000000
11/4/2011	7:00:59 PM	H2 MFC set to  0.000000
11/4/2011	7:00:59 PM	BCl3 MFC set to  0.000000
11/4/2011	7:00:59 PM	PHl3 MFC set to  0.000000
11/4/2011	7:00:59 PM	SiCl4 MFC set to  0.000000
11/4/2011	7:00:59 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	7:01:00 PM	Tube furnace set to 0
11/4/2011	7:01:01 PM	Run finished at 7:01 PM
11/4/2011	7:34:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/4/2011	7:34:16 PM	Recipe started at 7:34 PM
11/4/2011	7:34:16 PM	Helium valve closed
11/4/2011	7:34:16 PM	H2 valve closed
11/4/2011	7:34:16 PM	BCl3 valve closed
11/4/2011	7:34:16 PM	PH3 valve closed
11/4/2011	7:34:17 PM	SiCl4 pre valve closed
11/4/2011	7:34:17 PM	SiCl4 post valve closed
11/4/2011	7:34:17 PM	Main Vac valve closed
11/4/2011	7:34:17 PM	Bypass valve closed
11/4/2011	7:34:17 PM	Bubbler valve closed
11/4/2011	7:34:17 PM	Helium MFC set to  0.000000
11/4/2011	7:34:17 PM	H2 MFC set to  0.000000
11/4/2011	7:34:17 PM	BCl3 MFC set to  0.000000
11/4/2011	7:34:17 PM	PHl3 MFC set to  0.000000
11/4/2011	7:34:17 PM	SiCl4 MFC set to  0.000000
11/4/2011	7:34:17 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	7:34:17 PM	Tube furnace set to 0
11/4/2011	7:34:20 PM	H2 valve closed
11/4/2011	7:34:20 PM	BCl3 valve closed
11/4/2011	7:34:20 PM	PH3 valve closed
11/4/2011	7:34:20 PM	SiCl4 pre valve closed
11/4/2011	7:34:20 PM	SiCl4 post valve closed
11/4/2011	7:34:20 PM	Main Vac valve closed
11/4/2011	7:34:20 PM	Bypass valve closed
11/4/2011	7:34:20 PM	Bubbler valve closed
11/4/2011	7:34:20 PM	Helium valve opened
11/4/2011	7:34:20 PM	Helium MFC set to  500.000000
11/4/2011	7:34:20 PM	H2 MFC set to  0.000000
11/4/2011	7:34:20 PM	BCl3 MFC set to  0.000000
11/4/2011	7:34:20 PM	PHl3 MFC set to  0.000000
11/4/2011	7:34:20 PM	SiCl4 MFC set to  0.000000
11/4/2011	7:34:20 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	7:34:20 PM	Tube furnace set to 0
11/4/2011	7:35:25 PM	Helium valve closed
11/4/2011	7:35:25 PM	H2 valve closed
11/4/2011	7:35:25 PM	BCl3 valve closed
11/4/2011	7:35:25 PM	PH3 valve closed
11/4/2011	7:35:25 PM	SiCl4 pre valve closed
11/4/2011	7:35:25 PM	SiCl4 post valve closed
11/4/2011	7:35:25 PM	Main Vac valve closed
11/4/2011	7:35:25 PM	Bypass valve closed
11/4/2011	7:35:25 PM	Bubbler valve closed
11/4/2011	7:35:25 PM	Helium MFC set to  0.000000
11/4/2011	7:35:25 PM	H2 MFC set to  0.000000
11/4/2011	7:35:25 PM	BCl3 MFC set to  0.000000
11/4/2011	7:35:25 PM	PHl3 MFC set to  0.000000
11/4/2011	7:35:25 PM	SiCl4 MFC set to  0.000000
11/4/2011	7:35:25 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	7:35:25 PM	Tube furnace set to 0
11/4/2011	7:35:26 PM	Run finished at 7:35 PM
11/4/2011	7:35:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/4/2011	7:37:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/4/2011	7:37:43 PM	Recipe started at 7:37 PM
11/4/2011	7:37:43 PM	Helium valve closed
11/4/2011	7:37:43 PM	H2 valve closed
11/4/2011	7:37:43 PM	BCl3 valve closed
11/4/2011	7:37:43 PM	PH3 valve closed
11/4/2011	7:37:43 PM	SiCl4 pre valve closed
11/4/2011	7:37:43 PM	SiCl4 post valve closed
11/4/2011	7:37:43 PM	Main Vac valve closed
11/4/2011	7:37:43 PM	Bubbler valve closed
11/4/2011	7:37:43 PM	Bypass valve opened
11/4/2011	7:37:43 PM	Helium MFC set to  0.000000
11/4/2011	7:37:43 PM	H2 MFC set to  0.000000
11/4/2011	7:37:43 PM	BCl3 MFC set to  0.000000
11/4/2011	7:37:43 PM	PHl3 MFC set to  0.000000
11/4/2011	7:37:43 PM	SiCl4 MFC set to  0.000000
11/4/2011	7:37:43 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	7:37:43 PM	Tube furnace set to 0
11/4/2011	7:38:43 PM	Helium valve closed
11/4/2011	7:38:43 PM	H2 valve closed
11/4/2011	7:38:43 PM	BCl3 valve closed
11/4/2011	7:38:43 PM	PH3 valve closed
11/4/2011	7:38:43 PM	SiCl4 pre valve closed
11/4/2011	7:38:43 PM	SiCl4 post valve closed
11/4/2011	7:38:43 PM	Main Vac valve closed
11/4/2011	7:38:43 PM	Bubbler valve closed
11/4/2011	7:38:43 PM	Bypass valve opened
11/4/2011	7:38:43 PM	Helium MFC set to  0.000000
11/4/2011	7:38:43 PM	H2 MFC set to  0.000000
11/4/2011	7:38:43 PM	BCl3 MFC set to  0.000000
11/4/2011	7:38:43 PM	PHl3 MFC set to  0.000000
11/4/2011	7:38:43 PM	SiCl4 MFC set to  0.000000
11/4/2011	7:38:43 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	7:38:43 PM	Tube furnace set to 0
11/4/2011	7:39:43 PM	Helium valve closed
11/4/2011	7:39:43 PM	H2 valve closed
11/4/2011	7:39:43 PM	BCl3 valve closed
11/4/2011	7:39:43 PM	PH3 valve closed
11/4/2011	7:39:43 PM	SiCl4 pre valve closed
11/4/2011	7:39:43 PM	SiCl4 post valve closed
11/4/2011	7:39:43 PM	Bypass valve closed
11/4/2011	7:39:43 PM	Bubbler valve closed
11/4/2011	7:39:43 PM	Main Vac valve opened
11/4/2011	7:39:43 PM	Helium MFC set to  0.000000
11/4/2011	7:39:43 PM	H2 MFC set to  0.000000
11/4/2011	7:39:43 PM	BCl3 MFC set to  0.000000
11/4/2011	7:39:43 PM	PHl3 MFC set to  0.000000
11/4/2011	7:39:43 PM	SiCl4 MFC set to  0.000000
11/4/2011	7:39:43 PM	Bypass solenoid MFC set to  0.000000
11/4/2011	7:39:43 PM	Tube furnace set to 0
11/4/2011	7:39:44 PM	Run finished at 7:39 PM
11/4/2011	7:39:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
